JVB 13_491.pdf (195.1 kB)
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Copyright (1995) American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society.The following article appeared in Journal of Vacuum Science and Technology B, 13(2),pp.491-493 ; 1995 and may be found at http://link.aip.org/link/?jvb/13/491. |
JVB 13_491.pdf
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https://nitech.repo.nii.ac.jp/record/4344/files/JVB 13_491.pdf